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MEMS and MOEMS technology and applications

Detalles Bibliográficos
Autor principal:	Rai-Choudhury, Prosenjit
Lenguaje:	eng
Publicado:	Society of Photo-Optical Instrumentation Engineers (SPIE) 2000
Materias:	Engineering
Acceso en línea:	http://cds.cern.ch/record/2295920

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