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Mask layout of multi-project wafer runs
| Autores principales: | , |
|---|---|
| Formato: | info:eu-repo/semantics/article |
| Lenguaje: | eng |
| Publicado: |
2017
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2297361 |
| _version_ | 1780956845877231616 |
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| author | Vila, Ivan Macchiolo, Anna |
| author_facet | Vila, Ivan Macchiolo, Anna |
| author_sort | Vila, Ivan |
| collection | CERN |
| format | info:eu-repo/semantics/article |
| id | cern-2297361 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2017 |
| record_format | invenio |
| spelling | cern-22973612019-09-30T06:29:59Z http://cds.cern.ch/record/2297361 eng Vila, Ivan Macchiolo, Anna Mask layout of multi-project wafer runs Detectors and Experimental Techniques 7: Advanced hybrid pixel detectors info:eu-repo/grantAgreement/EC/FP7/654168 info:eu-repo/semantics/openAccess Education Level info:eu-repo/semantics/article http://cds.cern.ch/record/2297361 2017 |
| spellingShingle | Detectors and Experimental Techniques 7: Advanced hybrid pixel detectors Vila, Ivan Macchiolo, Anna Mask layout of multi-project wafer runs |
| title | Mask layout of multi-project wafer runs |
| title_full | Mask layout of multi-project wafer runs |
| title_fullStr | Mask layout of multi-project wafer runs |
| title_full_unstemmed | Mask layout of multi-project wafer runs |
| title_short | Mask layout of multi-project wafer runs |
| title_sort | mask layout of multi-project wafer runs |
| topic | Detectors and Experimental Techniques 7: Advanced hybrid pixel detectors |
| url | http://cds.cern.ch/record/2297361 http://cds.cern.ch/record/2297361 |
| work_keys_str_mv | AT vilaivan masklayoutofmultiprojectwaferruns AT macchioloanna masklayoutofmultiprojectwaferruns |