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Vacuum and ultravacuum: physics and technology
Vacuum technology has enormous impact on human life in many aspects and fields, such as metallurgy, material development and production, food and electronic industry, microelectronics, device fabrication, physics, materials science, space science, engineering, chemistry, technology of low temperatur...
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| Lenguaje: | eng |
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CRC Press
2018
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| Acceso en línea: | http://cds.cern.ch/record/2300997 |