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Direct evidence for substitutional Li after ion-implanted into highly phosphorus-doped Si
| Autores principales: | , , , , |
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| Lenguaje: | eng |
| Publicado: |
1993
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1063/1.108839 http://cds.cern.ch/record/260193 |