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MEMS: fundamental technology and applications
"The book editors have managed to assemble a group of extraordinary authors to provide their expertise to this book. While giving an excellent overview of the history and the state of the art of MEMS technology, this book also focuses on current trends and topics such as gyroscopes that current...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Chapman and Hall/CRC
2013
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| Acceso en línea: | http://cds.cern.ch/record/2622732 |