MEMS: fundamental technology and applications

"The book editors have managed to assemble a group of extraordinary authors to provide their expertise to this book. While giving an excellent overview of the history and the state of the art of MEMS technology, this book also focuses on current trends and topics such as gyroscopes that current...

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Detalles Bibliográficos
Autores principales: Choudhary, Vikas, Iniewski, Krzysztof
Lenguaje:eng
Publicado: Chapman and Hall/CRC 2013
Materias:
Engineering
Acceso en línea:http://cds.cern.ch/record/2622732
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author Choudhary, Vikas
Iniewski, Krzysztof
author_facet Choudhary, Vikas
Iniewski, Krzysztof
author_sort Choudhary, Vikas
collection CERN
description "The book editors have managed to assemble a group of extraordinary authors to provide their expertise to this book. While giving an excellent overview of the history and the state of the art of MEMS technology, this book also focuses on current trends and topics such as gyroscopes that currently experience significant and increasing popularity in research and in industry. It is well written and the material is presented in a well-structured way making it easily accessible to any reader with a technical background."-Boris Stoeber, The University of British Columbia, Vancouver, Canada.
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institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2013
publisher Chapman and Hall/CRC
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spelling cern-26227322021-04-21T18:48:25Zhttp://cds.cern.ch/record/2622732engChoudhary, VikasIniewski, KrzysztofMEMS: fundamental technology and applicationsEngineering"The book editors have managed to assemble a group of extraordinary authors to provide their expertise to this book. While giving an excellent overview of the history and the state of the art of MEMS technology, this book also focuses on current trends and topics such as gyroscopes that currently experience significant and increasing popularity in research and in industry. It is well written and the material is presented in a well-structured way making it easily accessible to any reader with a technical background."-Boris Stoeber, The University of British Columbia, Vancouver, Canada.Chapman and Hall/CRCoai:cds.cern.ch:26227322013
spellingShingle Engineering
Choudhary, Vikas
Iniewski, Krzysztof
MEMS: fundamental technology and applications
title MEMS: fundamental technology and applications
title_full MEMS: fundamental technology and applications
title_fullStr MEMS: fundamental technology and applications
title_full_unstemmed MEMS: fundamental technology and applications
title_short MEMS: fundamental technology and applications
title_sort mems: fundamental technology and applications
topic Engineering
url http://cds.cern.ch/record/2622732
work_keys_str_mv AT choudharyvikas memsfundamentaltechnologyandapplications
AT iniewskikrzysztof memsfundamentaltechnologyandapplications

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