Cargando…
Physics of radiofrequency capacitive discharge
Autor principal: | |
---|---|
Lenguaje: | eng |
Publicado: |
Chapman and Hall/CRC
2018
|
Materias: | |
Acceso en línea: | http://cds.cern.ch/record/2631159 |
_version_ | 1780959499739201536 |
---|---|
author | Savinov, V P |
author_facet | Savinov, V P |
author_sort | Savinov, V P |
collection | CERN |
id | cern-2631159 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 2018 |
publisher | Chapman and Hall/CRC |
record_format | invenio |
spelling | cern-26311592021-04-21T18:45:16Zhttp://cds.cern.ch/record/2631159engSavinov, V PPhysics of radiofrequency capacitive dischargeEngineeringChapman and Hall/CRCoai:cds.cern.ch:26311592018 |
spellingShingle | Engineering Savinov, V P Physics of radiofrequency capacitive discharge |
title | Physics of radiofrequency capacitive discharge |
title_full | Physics of radiofrequency capacitive discharge |
title_fullStr | Physics of radiofrequency capacitive discharge |
title_full_unstemmed | Physics of radiofrequency capacitive discharge |
title_short | Physics of radiofrequency capacitive discharge |
title_sort | physics of radiofrequency capacitive discharge |
topic | Engineering |
url | http://cds.cern.ch/record/2631159 |
work_keys_str_mv | AT savinovvp physicsofradiofrequencycapacitivedischarge |