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Electromechanics and MEMS
"Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessa...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Cambridge University Press
2013
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2634618 |