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As-implanted lattice site of dopants in semiconductors
Autores principales: | Hofsäss, H C, Linder, G, Winter, S, Besold, B, Recknagel, E, Weyer, G, Petersen, J W |
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Lenguaje: | eng |
Publicado: |
1986
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.4028/www.scientific.net/MSF.10-12.1183 http://cds.cern.ch/record/264811 |
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