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Advanced Ta-based diffusion barriers for Cu interconnects
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Nova Science Publishers
2008
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2651687 |
| _version_ | 1780960926118182912 |
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| author | Hubner, Rene |
| author_facet | Hubner, Rene |
| author_sort | Hubner, Rene |
| collection | CERN |
| id | cern-2651687 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2008 |
| publisher | Nova Science Publishers |
| record_format | invenio |
| spelling | cern-26516872021-04-21T18:37:57Zhttp://cds.cern.ch/record/2651687engHubner, ReneAdvanced Ta-based diffusion barriers for Cu interconnectsEngineeringNova Science Publishersoai:cds.cern.ch:26516872008 |
| spellingShingle | Engineering Hubner, Rene Advanced Ta-based diffusion barriers for Cu interconnects |
| title | Advanced Ta-based diffusion barriers for Cu interconnects |
| title_full | Advanced Ta-based diffusion barriers for Cu interconnects |
| title_fullStr | Advanced Ta-based diffusion barriers for Cu interconnects |
| title_full_unstemmed | Advanced Ta-based diffusion barriers for Cu interconnects |
| title_short | Advanced Ta-based diffusion barriers for Cu interconnects |
| title_sort | advanced ta-based diffusion barriers for cu interconnects |
| topic | Engineering |
| url | http://cds.cern.ch/record/2651687 |
| work_keys_str_mv | AT hubnerrene advancedtabaseddiffusionbarriersforcuinterconnects |