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Introduction to focused ion beam nanometrology
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Morgan & Claypool
2015
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2670949 |
| _version_ | 1780962318269546496 |
|---|---|
| author | Cox, David C |
| author_facet | Cox, David C |
| author_sort | Cox, David C |
| collection | CERN |
| id | cern-2670949 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2015 |
| publisher | Morgan & Claypool |
| record_format | invenio |
| spelling | cern-26709492021-04-21T18:26:21Zhttp://cds.cern.ch/record/2670949engCox, David CIntroduction to focused ion beam nanometrologyDetectors and Experimental TechniquesMorgan & Claypooloai:cds.cern.ch:26709492015 |
| spellingShingle | Detectors and Experimental Techniques Cox, David C Introduction to focused ion beam nanometrology |
| title | Introduction to focused ion beam nanometrology |
| title_full | Introduction to focused ion beam nanometrology |
| title_fullStr | Introduction to focused ion beam nanometrology |
| title_full_unstemmed | Introduction to focused ion beam nanometrology |
| title_short | Introduction to focused ion beam nanometrology |
| title_sort | introduction to focused ion beam nanometrology |
| topic | Detectors and Experimental Techniques |
| url | http://cds.cern.ch/record/2670949 |
| work_keys_str_mv | AT coxdavidc introductiontofocusedionbeamnanometrology |