Experiments and modelling for glow discharge plasmas applied to niobium sputter deposition in superconducting radiofrequency cavities

Thin film coatings are ubiquitous in modern daily lives, from the semi-conductor industry to aesthetic applications, and rely on the modification of a given material to enhance its surface properties. At CERN (European Organization for Nuclear Research), thin film coatings are used for several applicat...

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Detalles Bibliográficos
Autor principal: Richard, Thibaut
Lenguaje:eng
Publicado: Ecole Polytechnique, Lausanne 2019
Materias:
Engineering
Acceso en línea:http://cds.cern.ch/record/2682123

Internet

http://cds.cern.ch/record/2682123

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