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Flash lamp annealing: from basics to applications

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reade...

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Detalles Bibliográficos
Autores principales: Rebohle, Lars, Prucnal, Slawomir, Reichel, Denise
Lenguaje:eng
Publicado: Springer 2019
Materias:
Acceso en línea:https://dx.doi.org/10.1007/978-3-030-23299-3
http://cds.cern.ch/record/2685035