Cargando…
Flash lamp annealing: from basics to applications
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reade...
Autores principales: | , , |
---|---|
Lenguaje: | eng |
Publicado: |
Springer
2019
|
Materias: | |
Acceso en línea: | https://dx.doi.org/10.1007/978-3-030-23299-3 http://cds.cern.ch/record/2685035 |