Flash lamp annealing: from basics to applications

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reade...

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Detalles Bibliográficos
Autores principales: Rebohle, Lars, Prucnal, Slawomir, Reichel, Denise
Lenguaje:eng
Publicado: Springer 2019
Materias:
Other Fields of Physics
Acceso en línea:https://dx.doi.org/10.1007/978-3-030-23299-3
http://cds.cern.ch/record/2685035
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author Rebohle, Lars
Prucnal, Slawomir
Reichel, Denise
author_facet Rebohle, Lars
Prucnal, Slawomir
Reichel, Denise
author_sort Rebohle, Lars
collection CERN
description This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
id cern-2685035
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2019
publisher Springer
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spelling cern-26850352021-04-21T18:21:21Zdoi:10.1007/978-3-030-23299-3http://cds.cern.ch/record/2685035engRebohle, LarsPrucnal, SlawomirReichel, DeniseFlash lamp annealing: from basics to applicationsOther Fields of PhysicsThis book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.Springeroai:cds.cern.ch:26850352019
spellingShingle Other Fields of Physics
Rebohle, Lars
Prucnal, Slawomir
Reichel, Denise
Flash lamp annealing: from basics to applications
title Flash lamp annealing: from basics to applications
title_full Flash lamp annealing: from basics to applications
title_fullStr Flash lamp annealing: from basics to applications
title_full_unstemmed Flash lamp annealing: from basics to applications
title_short Flash lamp annealing: from basics to applications
title_sort flash lamp annealing: from basics to applications
topic Other Fields of Physics
url https://dx.doi.org/10.1007/978-3-030-23299-3
http://cds.cern.ch/record/2685035
work_keys_str_mv AT rebohlelars flashlampannealingfrombasicstoapplications
AT prucnalslawomir flashlampannealingfrombasicstoapplications
AT reicheldenise flashlampannealingfrombasicstoapplications

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