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Flash lamp annealing: from basics to applications
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reade...
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2019
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-3-030-23299-3 http://cds.cern.ch/record/2685035 |