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MATERIALS LABORATORY - FOCUSED ION BEAM (FIB) XB540 BY ZEISS
A focused ion beam of gallium ions (Ga+) is used to perform micro- and nano-machining of a sample’s surface through the removal of atoms, without altering the sample’s properties. In combination with scanning electron microscopy (SEM) and various detectors, the ion beam allows us to study the micros...
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| Lenguaje: | eng-fre |
| Publicado: |
2019
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| Acceso en línea: | http://cds.cern.ch/record/2692815 |