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MATERIALS LABORATORY - FOCUSED ION BEAM (FIB) XB540 BY ZEISS

A focused ion beam of gallium ions (Ga+) is used to perform micro- and nano-machining of a sample’s surface through the removal of atoms, without altering the sample’s properties. In combination with scanning electron microscopy (SEM) and various detectors, the ion beam allows us to study the micros...

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Autor principal: Vanden Broeck, Renilde
Lenguaje:eng-fre
Publicado: 2019
Acceso en línea:http://cds.cern.ch/record/2692815
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author Vanden Broeck, Renilde
author_facet Vanden Broeck, Renilde
author_sort Vanden Broeck, Renilde
collection CERN
description A focused ion beam of gallium ions (Ga+) is used to perform micro- and nano-machining of a sample’s surface through the removal of atoms, without altering the sample’s properties. In combination with scanning electron microscopy (SEM) and various detectors, the ion beam allows us to study the microstructure, topography and chemical composition of cross sections and/or volumes of a material. With the microscopy set in transmission mode (STEM), nanometric resolution can be achieved.
id cern-2692815
institution Organización Europea para la Investigación Nuclear
language eng-fre
publishDate 2019
record_format invenio
spelling cern-26928152019-10-09T21:52:57Zhttp://cds.cern.ch/record/2692815eng-freVanden Broeck, RenildeMATERIALS LABORATORY - FOCUSED ION BEAM (FIB) XB540 BY ZEISSA focused ion beam of gallium ions (Ga+) is used to perform micro- and nano-machining of a sample’s surface through the removal of atoms, without altering the sample’s properties. In combination with scanning electron microscopy (SEM) and various detectors, the ion beam allows us to study the microstructure, topography and chemical composition of cross sections and/or volumes of a material. With the microscopy set in transmission mode (STEM), nanometric resolution can be achieved.Poster-2019-798oai:cds.cern.ch:26928152019-09-19
spellingShingle Vanden Broeck, Renilde
MATERIALS LABORATORY - FOCUSED ION BEAM (FIB) XB540 BY ZEISS
title MATERIALS LABORATORY - FOCUSED ION BEAM (FIB) XB540 BY ZEISS
title_full MATERIALS LABORATORY - FOCUSED ION BEAM (FIB) XB540 BY ZEISS
title_fullStr MATERIALS LABORATORY - FOCUSED ION BEAM (FIB) XB540 BY ZEISS
title_full_unstemmed MATERIALS LABORATORY - FOCUSED ION BEAM (FIB) XB540 BY ZEISS
title_short MATERIALS LABORATORY - FOCUSED ION BEAM (FIB) XB540 BY ZEISS
title_sort materials laboratory - focused ion beam (fib) xb540 by zeiss
url http://cds.cern.ch/record/2692815
work_keys_str_mv AT vandenbroeckrenilde materialslaboratoryfocusedionbeamfibxb540byzeiss