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Production of ultra-high-vacuum chambers with integrated getter thin-film coatings by electroforming
Titanium Zirconium Vanadium (TiZrV) thin film coatings are used in particle accelerators and synchrotron light sources to maintain ultra-high vacuum conditions. They are deposited on the internal walls of the vacuum chambers, transforming them from a gas source into a chemical pump. The trend in ele...
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Lenguaje: | eng |
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2019
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Acceso en línea: | https://dx.doi.org/10.17181/CERN.A2EJ.YIS2 http://cds.cern.ch/record/2693564 |