Cargando…
Physical design and mask synthesis for directed self-assembly lithography
| Autores principales: | , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Springer
2018
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2697921 |
| _version_ | 1780964246274703360 |
|---|---|
| author | Shim, Seongbo Shin, Youngsoo |
| author_facet | Shim, Seongbo Shin, Youngsoo |
| author_sort | Shim, Seongbo |
| collection | CERN |
| id | cern-2697921 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2018 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-26979212021-04-21T18:18:19Zhttp://cds.cern.ch/record/2697921engShim, SeongboShin, YoungsooPhysical design and mask synthesis for directed self-assembly lithographyEngineeringSpringeroai:cds.cern.ch:26979212018 |
| spellingShingle | Engineering Shim, Seongbo Shin, Youngsoo Physical design and mask synthesis for directed self-assembly lithography |
| title | Physical design and mask synthesis for directed self-assembly lithography |
| title_full | Physical design and mask synthesis for directed self-assembly lithography |
| title_fullStr | Physical design and mask synthesis for directed self-assembly lithography |
| title_full_unstemmed | Physical design and mask synthesis for directed self-assembly lithography |
| title_short | Physical design and mask synthesis for directed self-assembly lithography |
| title_sort | physical design and mask synthesis for directed self-assembly lithography |
| topic | Engineering |
| url | http://cds.cern.ch/record/2697921 |
| work_keys_str_mv | AT shimseongbo physicaldesignandmasksynthesisfordirectedselfassemblylithography AT shinyoungsoo physicaldesignandmasksynthesisfordirectedselfassemblylithography |