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A practical guide to surface metrology
This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the...
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Lenguaje: | eng |
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Springer
2019
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Acceso en línea: | https://dx.doi.org/10.1007/978-3-030-29454-0 http://cds.cern.ch/record/2706764 |