Gettering and defect engineering in semiconductor technology III

Proceedings of the 3rd International Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST '89) held at Garzau, GDR, October 1989.

Detalles Bibliográficos
Autor principal: Kittler, M
Lenguaje:eng
Publicado: Trans Tech Publications 1989
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2758009

Internet

http://cds.cern.ch/record/2758009

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