Gettering and defect engineering in semiconductor technology III

Proceedings of the 3rd International Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST '89) held at Garzau, GDR, October 1989.

Detalles Bibliográficos
Autor principal: Kittler, M
Lenguaje:eng
Publicado: Trans Tech Publications 1989
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2758009
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author Kittler, M
author_facet Kittler, M
author_sort Kittler, M
collection CERN
description Proceedings of the 3rd International Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST '89) held at Garzau, GDR, October 1989.
id cern-2758009
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1989
publisher Trans Tech Publications
record_format invenio
spelling cern-27580092021-04-21T16:40:44Zhttp://cds.cern.ch/record/2758009engKittler, MGettering and defect engineering in semiconductor technology IIIXXProceedings of the 3rd International Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST '89) held at Garzau, GDR, October 1989.Trans Tech Publicationsoai:cds.cern.ch:27580091989
spellingShingle XX
Kittler, M
Gettering and defect engineering in semiconductor technology III
title Gettering and defect engineering in semiconductor technology III
title_full Gettering and defect engineering in semiconductor technology III
title_fullStr Gettering and defect engineering in semiconductor technology III
title_full_unstemmed Gettering and defect engineering in semiconductor technology III
title_short Gettering and defect engineering in semiconductor technology III
title_sort gettering and defect engineering in semiconductor technology iii
topic XX
url http://cds.cern.ch/record/2758009
work_keys_str_mv AT kittlerm getteringanddefectengineeringinsemiconductortechnologyiii

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