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Gettering and defect engineering in semiconductor technology VI
GADEST 1995 Proceedings of the 6th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology (GADEST '95) held in Berlin, Germany, September 1995.
Autores principales: | , , |
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Lenguaje: | eng |
Publicado: |
Trans Tech Publications
1996
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/2762403 |