Gettering and defect engineering in semiconductor technology VI

GADEST 1995 Proceedings of the 6th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology (GADEST '95) held in Berlin, Germany, September 1995.

Detalles Bibliográficos
Autores principales: Richter, Hans, Kittler, Martin, Claeys, Cor
Lenguaje:eng
Publicado: Trans Tech Publications 1996
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2762403
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author Richter, Hans
Kittler, Martin
Claeys, Cor
author_facet Richter, Hans
Kittler, Martin
Claeys, Cor
author_sort Richter, Hans
collection CERN
description GADEST 1995 Proceedings of the 6th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology (GADEST '95) held in Berlin, Germany, September 1995.
id cern-2762403
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1996
publisher Trans Tech Publications
record_format invenio
spelling cern-27624032021-04-21T16:39:04Zhttp://cds.cern.ch/record/2762403engRichter, HansKittler, MartinClaeys, CorGettering and defect engineering in semiconductor technology VIXXGADEST 1995 Proceedings of the 6th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology (GADEST '95) held in Berlin, Germany, September 1995.Trans Tech Publicationsoai:cds.cern.ch:27624031996
spellingShingle XX
Richter, Hans
Kittler, Martin
Claeys, Cor
Gettering and defect engineering in semiconductor technology VI
title Gettering and defect engineering in semiconductor technology VI
title_full Gettering and defect engineering in semiconductor technology VI
title_fullStr Gettering and defect engineering in semiconductor technology VI
title_full_unstemmed Gettering and defect engineering in semiconductor technology VI
title_short Gettering and defect engineering in semiconductor technology VI
title_sort gettering and defect engineering in semiconductor technology vi
topic XX
url http://cds.cern.ch/record/2762403
work_keys_str_mv AT richterhans getteringanddefectengineeringinsemiconductortechnologyvi
AT kittlermartin getteringanddefectengineeringinsemiconductortechnologyvi
AT claeyscor getteringanddefectengineeringinsemiconductortechnologyvi

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