Gettering and defect engineering in semiconductor technology VI

GADEST 1995 Proceedings of the 6th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology (GADEST '95) held in Berlin, Germany, September 1995.

Detalles Bibliográficos
Autores principales: Richter, Hans, Kittler, Martin, Claeys, Cor
Lenguaje:eng
Publicado: Trans Tech Publications 1996
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2762403

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