Gettering and defect engineering in semiconductor technology V

GADEST '93 Proceedings of the 5th International Autumn Meeting, Chossewitz, Frankfurt (Oder), Germany, October 09-14, 1993.

Detalles Bibliográficos
Autores principales: Grimmeiss, Hermann G, Kittler, Martin, Richter, Hans
Lenguaje:eng
Publicado: Trans Tech Publications 1993
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2762405

Internet

http://cds.cern.ch/record/2762405

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