Gettering and defect engineering in semiconductor technology V

GADEST '93 Proceedings of the 5th International Autumn Meeting, Chossewitz, Frankfurt (Oder), Germany, October 09-14, 1993.

Detalles Bibliográficos
Autores principales: Grimmeiss, Hermann G, Kittler, Martin, Richter, Hans
Lenguaje:eng
Publicado: Trans Tech Publications 1993
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2762405
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author Grimmeiss, Hermann G
Kittler, Martin
Richter, Hans
author_facet Grimmeiss, Hermann G
Kittler, Martin
Richter, Hans
author_sort Grimmeiss, Hermann G
collection CERN
description GADEST '93 Proceedings of the 5th International Autumn Meeting, Chossewitz, Frankfurt (Oder), Germany, October 09-14, 1993.
id cern-2762405
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1993
publisher Trans Tech Publications
record_format invenio
spelling cern-27624052021-04-21T16:39:04Zhttp://cds.cern.ch/record/2762405engGrimmeiss, Hermann GKittler, MartinRichter, HansGettering and defect engineering in semiconductor technology VXXGADEST '93 Proceedings of the 5th International Autumn Meeting, Chossewitz, Frankfurt (Oder), Germany, October 09-14, 1993.Trans Tech Publicationsoai:cds.cern.ch:27624051993
spellingShingle XX
Grimmeiss, Hermann G
Kittler, Martin
Richter, Hans
Gettering and defect engineering in semiconductor technology V
title Gettering and defect engineering in semiconductor technology V
title_full Gettering and defect engineering in semiconductor technology V
title_fullStr Gettering and defect engineering in semiconductor technology V
title_full_unstemmed Gettering and defect engineering in semiconductor technology V
title_short Gettering and defect engineering in semiconductor technology V
title_sort gettering and defect engineering in semiconductor technology v
topic XX
url http://cds.cern.ch/record/2762405
work_keys_str_mv AT grimmeisshermanng getteringanddefectengineeringinsemiconductortechnologyv
AT kittlermartin getteringanddefectengineeringinsemiconductortechnologyv
AT richterhans getteringanddefectengineeringinsemiconductortechnologyv

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