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Improved thin film growth using Slow Kinetics Intermittent Sputtering
Radio-frequency off-axis magnetron sputtering is a well established technique to produce high quality epitaxial thin films of complex oxides. It has been successfully used for over two decades to grow thin films, superlattices and even solid solutions. The main drawback is the common lack of in situ...
| Autores principales: | , , , , |
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| Lenguaje: | eng |
| Publicado: |
2020
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1016/j.apsusc.2020.146077 http://cds.cern.ch/record/2799788 |