Cargando…

Niobium thin film thickness profile tailoring on complex shape substrates using unbalanced biased High Power Impulse Magnetron Sputtering

The authors report in this paper the possibility to control the thickness profile of a thin film deposited by High Power Impulse Magnetron Sputtering (HiPIMS). It is shown that the combination between a HiPIMS discharge, an unbalanced magnetic configuration and the application of a negative bias ont...

Descripción completa

Detalles Bibliográficos
Autores principales:	Rosaz, Guillaume, Bartkowska, Aleksandra, Carlos, Carlota P A, Richard, Thibaut, Taborelli, Mauro
Lenguaje:	eng
Publicado:	2022
Materias:	Accelerators and Storage Rings
Acceso en línea:	https://dx.doi.org/10.1016/j.surfcoat.2022.128306 http://cds.cern.ch/record/2803905

Ejemplares similares

Enhanced radio-frequency performance of niobium films on copper substrates deposited by high power impulse magnetron sputtering
por: Arzeo, M, et al.
Publicado: (2022)

Superconducting cavities produced by magnetron sputtering of niobium on copper
por: Benvenuti, Cristoforo, et al.
Publicado: (1988)

Unbalanced Cylindrical Magnetron for Accelerating Cavities Coating
por: Rosaz, Guillaume, et al.
Publicado: (2016)

Development of Nb$_3$Sn coatings by magnetron sputtering for SRF cavities
por: Rosaz, G., et al.
Publicado: (2016)

Oblique angle deposition of nickel thin films by high-power impulse magnetron sputtering
por: Hajihoseini, Hamidreza, et al.
Publicado: (2019)

Comparison of CrN Coatings Prepared Using High-Power Impulse Magnetron Sputtering and Direct Current Magnetron Sputtering
por: Bai, Heda, et al.
Publicado: (2023)

Electrical Properties of Aluminum Nitride Thick Films Magnetron Sputtered on Aluminum Substrates
por: Desideri, Daniele, et al.
Publicado: (2022)

Niobium films produced by magnetron sputtering using an Ar-He mixture as discharge gas
por: Schucan, G M, et al.
Publicado: (1995)

Improved film density for coatings at grazing angle of incidence in high power impulse magnetron sputtering with positive pulse
por: Avino, F, et al.
Publicado: (2020)

The Effect of Substrate Biasing during DC Magnetron Sputtering on the Quality of VO(2) Thin Films and Their Insulator–Metal Transition Behavior
por: Zhang, Chunzi, et al.
Publicado: (2019)

Fabrication of black aluminium thin films by magnetron sputtering
por: More-Chevalier, J., et al.
Publicado: (2020)

High power impulse magnetron sputtering: fundamentals, technologies, challenges and applications
por: Lundin, Daniel, et al.
Publicado: (2019)

Pathways to Tailor Photocatalytic Performance of TiO(2) Thin Films Deposited by Reactive Magnetron Sputtering
por: Vahl, Alexander, et al.
Publicado: (2019)

Effects of Film Thickness on the Residual Stress of Vanadium Dioxide Thin Films Grown by Magnetron Sputtering
por: Wang, Yuemin, et al.
Publicado: (2023)

Optical Properties of Amorphous Carbon Thin Films Fabricated Using a High-Energy-Impulse Magnetron-Sputtering Technique
por: Skowronski, Lukasz, et al.
Publicado: (2023)

Amorphous carbon thin films: Mechanisms of hydrogen incorporationduring magnetron sputtering and consequences for the secondary electronemission
por: Adame, C F, et al.
Publicado: (2023)

Review on Hydrophobic Thin Films Prepared Using Magnetron Sputtering Deposition
por: Ju, Yuxin, et al.
Publicado: (2023)

Characterization of Magnetron Sputtered BiTe-Based Thermoelectric Thin Films
por: Zhang, Zhenxue, et al.
Publicado: (2023)

Effect of Substrate Temperature on the Structural, Optical and Electrical Properties of DC Magnetron Sputtered VO(2) Thin Films
por: Zhang, Chunzi, et al.
Publicado: (2022)

Computational explorations in magnetron sputtering
por: McInerney, E J
Publicado: (2014)

Tuning Stoichiometry and Structure of Pd-WO(3−x) Thin Films for Hydrogen Gas Sensing by High-Power Impulse Magnetron Sputtering
por: Kumar, Nirmal, et al.
Publicado: (2020)

Microstructure and Antimicrobial Properties of Zr-Cu-Ti Thin-Film Metallic Glass Deposited Using High-Power Impulse Magnetron Sputtering
por: Tang, Jian-Fu, et al.
Publicado: (2022)

Thickness-dependent transport channels in topological insulator Bi(2)Se(3) thin films grown by magnetron sputtering
por: Wang, Wen Jie, et al.
Publicado: (2016)

Niobium sputter-coated QWRs
por: Stark, S, et al.
Publicado: (1998)

Nanoarchitectonics for Ultrathin Gold Films Deposited on Collagen Fabric by High-Power Impulse Magnetron Sputtering
por: Huang, Sheng-Yang, et al.
Publicado: (2022)

Development and Characterization of ZnO Piezoelectric Thin Film Sensors on GH4169 Superalloy Steel Substrate by Magnetron Sputtering
por: Mo, Guowei, et al.
Publicado: (2022)

Structural and optical properties of ZnS thin films deposited by RF magnetron sputtering
por: Hwang, Dong Hyun, et al.
Publicado: (2012)

Formation of Thin NiGe Films by Magnetron Sputtering and Flash Lamp Annealing
por: Begeza, Viktor, et al.
Publicado: (2020)

Thermoelectric Properties of Cu(2)Se Nano-Thin Film by Magnetron Sputtering
por: Yang, Liangliang, et al.
Publicado: (2021)

Multitarget Reactive Magnetron Sputtering towards the Production of Strontium Molybdate Thin Films
por: Andrulevičius, Mindaugas, et al.
Publicado: (2023)

The influence of cooldown conditions at transition temperature on the quality factor of niobium sputtered quarter-wave resonators for HIE-ISOLDE
por: Zhang, Pei, et al.
Publicado: (2015)

Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system
por: Changyom, Preecha, et al.
Publicado: (2023)

The Influence of AlN Intermediate Layer on the Structural and Chemical Properties of SiC Thin Films Produced by High-Power Impulse Magnetron Sputtering
por: Galvão, Nierlly, et al.
Publicado: (2019)

Effect of Substrate Negative Bias on the Microstructural, Optical, Mechanical, and Laser Damage Resistance Properties of HfO(2) Thin Films Grown by DC Reactive Magnetron Sputtering
por: Xi, Yingxue, et al.
Publicado: (2023)

Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering
por: Abegunde, Olayinka Oluwatosin, et al.
Publicado: (2020)

High Sensitivity SERS Substrate of a Few Nanometers Single-Layer Silver Thickness Fabricated by DC Magnetron Sputtering Technology
por: Wu, Hsing-Yu, et al.
Publicado: (2022)

High Power Impulse Magnetron Sputtering of In(2)O(3)/Sn Cold Sprayed Composite Target
por: Winnicki, Marcin, et al.
Publicado: (2021)

Enhanced Electrical Properties of Copper Nitride Films Deposited via High Power Impulse Magnetron Sputtering
por: Chen, Yin-Hung, et al.
Publicado: (2022)

Synthesis and Characterisation of Nanocomposite Mo-Fe-B Thin Films Deposited by Magnetron Sputtering
por: Malinovskis, Paulius, et al.
Publicado: (2021)

Preparation of different thin film catalysts by direct current magnetron sputtering for hydrogen generation
por: BOZKURT, Gamze, et al.
Publicado: (2020)

Cannot write session to /tmp/vufind_sessions/sess_upib30h52f8b2l317ncbht8r0m