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NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-ray Lithographies
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
Kluwer
1994
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/280542 |
| _version_ | 1780887914553540608 |
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| author | Gentili, Massimo Giovannella, Carlo Selci, Stefano |
| author_facet | Gentili, Massimo Giovannella, Carlo Selci, Stefano |
| author_sort | Gentili, Massimo |
| collection | CERN |
| id | cern-280542 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1994 |
| publisher | Kluwer |
| record_format | invenio |
| spelling | cern-2805422021-04-22T21:26:03Zhttp://cds.cern.ch/record/280542engGentili, MassimoGiovannella, CarloSelci, StefanoNATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-ray LithographiesOther Fields of PhysicsKluweroai:cds.cern.ch:2805421994 |
| spellingShingle | Other Fields of Physics Gentili, Massimo Giovannella, Carlo Selci, Stefano NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-ray Lithographies |
| title | NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-ray Lithographies |
| title_full | NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-ray Lithographies |
| title_fullStr | NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-ray Lithographies |
| title_full_unstemmed | NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-ray Lithographies |
| title_short | NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-ray Lithographies |
| title_sort | nato advanced research workshop on nanolithography: a borderland between stm, eb, ib, and x-ray lithographies |
| topic | Other Fields of Physics |
| url | http://cds.cern.ch/record/280542 |
| work_keys_str_mv | AT gentilimassimo natoadvancedresearchworkshoponnanolithographyaborderlandbetweenstmebibandxraylithographies AT giovannellacarlo natoadvancedresearchworkshoponnanolithographyaborderlandbetweenstmebibandxraylithographies AT selcistefano natoadvancedresearchworkshoponnanolithographyaborderlandbetweenstmebibandxraylithographies |