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Enhanced radio-frequency performance of niobium films on copper substrates deposited by high power impulse magnetron sputtering
We present a study of radio frequency properties of niobium films deposited on copper by two different approaches based on High Power Impulse Magnetron Sputtering, namely with a DC voltage biased substrate and with bipolar target voltage. Such approaches enable the synthesis of dense superconducting...
| Autores principales: | , , , , , , |
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| Lenguaje: | eng |
| Publicado: |
2022
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1088/1361-6668/ac5646 http://cds.cern.ch/record/2811187 |