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TCAD simulation of small-pitch 3D sensors for pixel detector upgrades at High Luminosity LHC
Applications at the High Luminosity LHC (HL-LHC) have required the development of a new generation of 3D pixel sensors with increased pixel granularity, extreme radiation hardness and low material budget. To this purpose, new 3D pixels have small pitch (e.g., 50×50 or 25×100 μm2) and reduced active...
| Autores principales: | , , , , |
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| Lenguaje: | eng |
| Publicado: |
2021
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1088/1742-6596/1766/1/012014 http://cds.cern.ch/record/2819898 |