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Digital Pixel Test Structures implemented in a 65 nm CMOS process
The ALICE ITS3 (Inner Tracking System 3) upgrade project and the CERN EP R&D on monolithic pixel sensors are investigating the feasibility of the Tower Partners Semiconductor Co. 65nm process for use in the next generation of vertex detectors. The ITS3 aims to employ wafer-scale Monolithic Activ...
Autores principales: | , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , |
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Lenguaje: | eng |
Publicado: |
2022
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1016/j.nima.2023.168589 http://cds.cern.ch/record/2845385 |