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Techniques for mass production of large-sized GEM foil by the Korean CMS group for CMS phase-2 upgrade
This study presents techniques for the mass production of large-sized GEM foils for the CMS phase-2 upgrade in Korea. The foil production facility is designed with a focus on mass production, including the adoption of the double-mask technique. A polyimide wet etching technology that uses mono ethan...
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| Lenguaje: | eng |
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2023
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| Acceso en línea: | https://dx.doi.org/10.1088/1748-0221/18/06/C06010 http://cds.cern.ch/record/2855910 |