Fabrication of a Silicon Electron Multiplier sensor using Metal Assisted Chemical Etching and its characterisation

The Silicon Electron Multiplier (SiEM) sensor is a novel sensor concept that enables charge multiplication by high electric fields generated by embedded metal electrodes within the sensor bulk. Metal assisted chemical etching (MacEtch) in gas phase with platinum as a catalyst has been used to fabric...

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Detalles Bibliográficos
Autores principales: Halvorsen, Marius Mæhlum, Coco, Victor, Collins, Paula, Sandaker, Heidi, Romano, Lucia
Lenguaje:eng
Publicado: 2023
Materias:
hep-ex
Particle Physics - Experiment
physics.ins-det
Detectors and Experimental Techniques
Acceso en línea:http://cds.cern.ch/record/2868889

Internet

http://cds.cern.ch/record/2868889

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