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Fabrication of a Silicon Electron Multiplier sensor using Metal Assisted Chemical Etching and its characterisation
The Silicon Electron Multiplier (SiEM) sensor is a novel sensor concept that enables charge multiplication by high electric fields generated by embedded metal electrodes within the sensor bulk. Metal assisted chemical etching (MacEtch) in gas phase with platinum as a catalyst has been used to fabric...
Autores principales: | Halvorsen, Marius Mæhlum, Coco, Victor, Collins, Paula, Sandaker, Heidi, Romano, Lucia |
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Lenguaje: | eng |
Publicado: |
2023
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/2868889 |
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