Optimization of a 65 nm CMOS imaging process for monolithic CMOS sensors for high energy physics

The long term goal of the CERN Experimental Physics Department R&D; on monolithic sensorsis the development of sub-100nm CMOS sensors for high energy physics. The first technologyselected is the TPSCo 65nm CMOS imaging technology. A first submission MLR1 includedseveral small test chips with sen...

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Detalles Bibliográficos
Autores principales: Rinella, G Aglieri, Andronic, A, Antonelli, M, Baccomi, R, Ballabriga, R, Barbero, M, Barrillon, P, Baudot, J, Becht, P, Benotto, F, Beole, S, Bertolone, G, Besson, A, Bialas, W, Borghello, G, Braach, J, Buckland, M, Bugiel, S, Buschmann, E, Camerini, P, Campbell, M, Carnesecchi, F, Cecconi, L, Charbon, E, Chauhan, A, Colledani, C, Contin, G, Dannheim, D, Dort, K, de Melo, J, Deng, W, De Robertis, G, Di Mauro, A, Martin, A Dorda, Dorokhov, A, Dorosz, P, Eberwein, G, Bitar, Z El, Fang, X, Fenigstein, A, Ferrero, C, Fougeron, D, Gajanana, D, Goffe, M, Gonella, L, Grelli, A, Gromov, V, Habib, A, Haim, A, Hansen, K, Hasenbichler, J, Hillemanns, H, Hong, G H, Hu, C, Isakov, A, Jaaskelainen, K, Junique, A, Kotliarov, A, Kremastiotis, I, Krizek, F, Kluge, A, Kluit, R, Kucharska, G, Kugathasan, T, Kwon, Y, La Rocca, P, Lautner, L, Leitao, P, Lim, B -H, Loddo, F, Mager, M, Marras, D, Martinengo, P, Masciocchi, S, Mathew, S, Menzel, M W, Morel, F, Mulyanto, B, Munker, M, Musa, L, Nakamura, M, Pangaud, P, Perciballi, S, Pham, H, Piro, F, Prino, F, Rachevski, S, Rebane, K, Reckleben, C, Reidt, F, Ricci, R, Russo, R, Sanna, I, Sarritzu, V, Savino, U, Schledewitz, D, Sedgwick, I, Senyukov, S, Snoeys, W, Soltveit, H K, Sonneveld, J, Soudier, J, Stachel, J, Suzuki, M, Svihra, P, Suljic, M, Takahashi, N, Termo, G, Tiltmann, N, Toledano, E, Triffiro, A, Turcato, A, Usai, G, Valin, I, Villani, A, Van Beelen, J B, Vassilev, M D, Vernieri, C, Vitkovskiy, A, Wu, Y, Yelkenci, A, Yuncu, A
Lenguaje:eng
Publicado: 2023
Materias:
Detectors and Experimental Techniques
Acceso en línea:https://dx.doi.org/10.22323/1.420.0083
http://cds.cern.ch/record/2869866

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