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Amorphous carbon thin films: Mechanisms of hydrogen incorporationduring magnetron sputtering and consequences for the secondary electronemission
Amorphous carbon (a-C) films, having low secondary electron yield (SEY), are usedat CERN to suppress electron multipacting in the beam pipes of particleaccelerators. It was already demonstrated that hydrogen impurities increase theSEY of a-C films. In this work, a systematic characterization of a se...
Autores principales: | , , , , , , , , , , , , |
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Lenguaje: | eng |
Publicado: |
2023
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Acceso en línea: | https://dx.doi.org/10.1116/6.0002759 http://cds.cern.ch/record/2875164 |