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Soft x-ray spectromicroscopy and its application to semiconductor microstructure characterization
| Autores principales: | , , , , , , |
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| Lenguaje: | eng |
| Publicado: |
1996
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/310156 |
| _version_ | 1780890022740754432 |
|---|---|
| author | Gozzo, F Franck, K Howells, M R Hussain, Z Warwick, A Padmore, H A Triplett, B B |
| author_facet | Gozzo, F Franck, K Howells, M R Hussain, Z Warwick, A Padmore, H A Triplett, B B |
| author_sort | Gozzo, F |
| collection | CERN |
| id | cern-310156 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1996 |
| record_format | invenio |
| spelling | cern-3101562019-09-30T06:29:59Zhttp://cds.cern.ch/record/310156engGozzo, FFranck, KHowells, M RHussain, ZWarwick, APadmore, H ATriplett, B BSoft x-ray spectromicroscopy and its application to semiconductor microstructure characterizationCondensed MatterLBNL-38899oai:cds.cern.ch:3101561996 |
| spellingShingle | Condensed Matter Gozzo, F Franck, K Howells, M R Hussain, Z Warwick, A Padmore, H A Triplett, B B Soft x-ray spectromicroscopy and its application to semiconductor microstructure characterization |
| title | Soft x-ray spectromicroscopy and its application to semiconductor microstructure characterization |
| title_full | Soft x-ray spectromicroscopy and its application to semiconductor microstructure characterization |
| title_fullStr | Soft x-ray spectromicroscopy and its application to semiconductor microstructure characterization |
| title_full_unstemmed | Soft x-ray spectromicroscopy and its application to semiconductor microstructure characterization |
| title_short | Soft x-ray spectromicroscopy and its application to semiconductor microstructure characterization |
| title_sort | soft x-ray spectromicroscopy and its application to semiconductor microstructure characterization |
| topic | Condensed Matter |
| url | http://cds.cern.ch/record/310156 |
| work_keys_str_mv | AT gozzof softxrayspectromicroscopyanditsapplicationtosemiconductormicrostructurecharacterization AT franckk softxrayspectromicroscopyanditsapplicationtosemiconductormicrostructurecharacterization AT howellsmr softxrayspectromicroscopyanditsapplicationtosemiconductormicrostructurecharacterization AT hussainz softxrayspectromicroscopyanditsapplicationtosemiconductormicrostructurecharacterization AT warwicka softxrayspectromicroscopyanditsapplicationtosemiconductormicrostructurecharacterization AT padmoreha softxrayspectromicroscopyanditsapplicationtosemiconductormicrostructurecharacterization AT triplettbb softxrayspectromicroscopyanditsapplicationtosemiconductormicrostructurecharacterization |