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Soft x-ray spectromicroscopy and its application to semiconductor microstructure characterization
Autores principales: | Gozzo, F, Franck, K, Howells, M R, Hussain, Z, Warwick, A, Padmore, H A, Triplett, B B |
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Lenguaje: | eng |
Publicado: |
1996
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/310156 |
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