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Application of a pulsed, RF-driven, multicusp source for low energy plasma immersion ion implantation
| Autores principales: | , , , , , , |
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| Lenguaje: | eng |
| Publicado: |
1996
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/311287 |
| _version_ | 1780890103125639168 |
|---|---|
| author | Wengrow, A B Leung, K N Perkins, L T Pickard, D S Rickard, M Williams, M D Tucker, M |
| author_facet | Wengrow, A B Leung, K N Perkins, L T Pickard, D S Rickard, M Williams, M D Tucker, M |
| author_sort | Wengrow, A B |
| collection | CERN |
| id | cern-311287 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1996 |
| record_format | invenio |
| spelling | cern-3112872019-09-30T06:29:59Zhttp://cds.cern.ch/record/311287engWengrow, A BLeung, K NPerkins, L TPickard, D SRickard, MWilliams, M DTucker, MApplication of a pulsed, RF-driven, multicusp source for low energy plasma immersion ion implantationAccelerators and Storage RingsLBL-38196oai:cds.cern.ch:3112871996 |
| spellingShingle | Accelerators and Storage Rings Wengrow, A B Leung, K N Perkins, L T Pickard, D S Rickard, M Williams, M D Tucker, M Application of a pulsed, RF-driven, multicusp source for low energy plasma immersion ion implantation |
| title | Application of a pulsed, RF-driven, multicusp source for low energy plasma immersion ion implantation |
| title_full | Application of a pulsed, RF-driven, multicusp source for low energy plasma immersion ion implantation |
| title_fullStr | Application of a pulsed, RF-driven, multicusp source for low energy plasma immersion ion implantation |
| title_full_unstemmed | Application of a pulsed, RF-driven, multicusp source for low energy plasma immersion ion implantation |
| title_short | Application of a pulsed, RF-driven, multicusp source for low energy plasma immersion ion implantation |
| title_sort | application of a pulsed, rf-driven, multicusp source for low energy plasma immersion ion implantation |
| topic | Accelerators and Storage Rings |
| url | http://cds.cern.ch/record/311287 |
| work_keys_str_mv | AT wengrowab applicationofapulsedrfdrivenmulticuspsourceforlowenergyplasmaimmersionionimplantation AT leungkn applicationofapulsedrfdrivenmulticuspsourceforlowenergyplasmaimmersionionimplantation AT perkinslt applicationofapulsedrfdrivenmulticuspsourceforlowenergyplasmaimmersionionimplantation AT pickardds applicationofapulsedrfdrivenmulticuspsourceforlowenergyplasmaimmersionionimplantation AT rickardm applicationofapulsedrfdrivenmulticuspsourceforlowenergyplasmaimmersionionimplantation AT williamsmd applicationofapulsedrfdrivenmulticuspsourceforlowenergyplasmaimmersionionimplantation AT tuckerm applicationofapulsedrfdrivenmulticuspsourceforlowenergyplasmaimmersionionimplantation |