Cargando…
Study of NbTiN coatings by reactive magnetron sputtering for the production of 1.5 GHz superconducting accelerating cavities
The production of thin films of Nb.35Ti.65N by magnetron sputtering is being studied for application to the realisation of 1.5 GHz accelerating cavities. Samples produced in a sputtering chamber havin g the same geometry as the RF resonator reached a Tc value of 15.5 K, a RRR of 1.45 and a low tempe...
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
1997
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/352133 |