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Structural and RF properties of niobium films deposited onto annealed niobium resonators
Studies have been performed on the properties of niobium thin films sputtered onto solid niobium TM010 resonators at 1.5 GHz. The purpose of the work is to study the behaviour of the film's RF and str uctural properties as a function of heat treatment temperature in order to determine if and at...
Autores principales: | , , , , , , , , , |
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Lenguaje: | eng |
Publicado: |
1997
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/352134 |