Cargando…
Meaurements of Particulate Contamination and Migration under Vacuum Using a Large Sensitive Area Particle Counter
A large area (50 cm2) particle counter working under vacuum (10-7 mbar) has been developed at CERN and applied to measurements of particles released by several vacuum components like valves, gauges and ion pumps. This technique has also been applied to study the migration of particles under vacuum w...
| Autores principales: | , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
1998
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/373139 |