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Experimental evaluation of niobium film pinholes [for LEP cavities]

To assess the quality of vacuum-deposited films, well-defined areas of free-hanging thin film may be obtained by chemically dissolving the substrate on a fraction of its surface. A global evaluation of the thin film pinholes is then possible by measuring the gas conductance across the film. To do so...

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Detalles Bibliográficos
Autores principales: Chiggiato, P, Amorosi, S, Benvenuti, Cristoforo, Malabaila, M
Lenguaje:eng
Publicado: 1999
Materias:
Acceso en línea:https://dx.doi.org/10.1016/S0042-207X(00)00388-2
http://cds.cern.ch/record/435198
Descripción
Sumario:To assess the quality of vacuum-deposited films, well-defined areas of free-hanging thin film may be obtained by chemically dissolving the substrate on a fraction of its surface. A global evaluation of the thin film pinholes is then possible by measuring the gas conductance across the film. To do so, copper discs clamped between Con-Flat flanges have been used to separate a chamber filled with helium gas from another chamber where the helium throughput was measured. This method has been used to compare films produced under dust-free and dusty conditions, of various surface roughnesses and at different deposition incidence angles.