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Experimental evaluation of niobium film pinholes [for LEP cavities]
To assess the quality of vacuum-deposited films, well-defined areas of free-hanging thin film may be obtained by chemically dissolving the substrate on a fraction of its surface. A global evaluation of the thin film pinholes is then possible by measuring the gas conductance across the film. To do so...
Autores principales: | , , , |
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Lenguaje: | eng |
Publicado: |
1999
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1016/S0042-207X(00)00388-2 http://cds.cern.ch/record/435198 |
Sumario: | To assess the quality of vacuum-deposited films, well-defined areas of free-hanging thin film may be obtained by chemically dissolving the substrate on a fraction of its surface. A global evaluation of the thin film pinholes is then possible by measuring the gas conductance across the film. To do so, copper discs clamped between Con-Flat flanges have been used to separate a chamber filled with helium gas from another chamber where the helium throughput was measured. This method has been used to compare films produced under dust-free and dusty conditions, of various surface roughnesses and at different deposition incidence angles. |
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