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Experimental evaluation of niobium film pinholes [for LEP cavities]
To assess the quality of vacuum-deposited films, well-defined areas of free-hanging thin film may be obtained by chemically dissolving the substrate on a fraction of its surface. A global evaluation of the thin film pinholes is then possible by measuring the gas conductance across the film. To do so...
Autores principales: | , , , |
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Lenguaje: | eng |
Publicado: |
1999
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1016/S0042-207X(00)00388-2 http://cds.cern.ch/record/435198 |
_version_ | 1780895391978356736 |
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author | Chiggiato, P Amorosi, S Benvenuti, Cristoforo Malabaila, M |
author_facet | Chiggiato, P Amorosi, S Benvenuti, Cristoforo Malabaila, M |
author_sort | Chiggiato, P |
collection | CERN |
description | To assess the quality of vacuum-deposited films, well-defined areas of free-hanging thin film may be obtained by chemically dissolving the substrate on a fraction of its surface. A global evaluation of the thin film pinholes is then possible by measuring the gas conductance across the film. To do so, copper discs clamped between Con-Flat flanges have been used to separate a chamber filled with helium gas from another chamber where the helium throughput was measured. This method has been used to compare films produced under dust-free and dusty conditions, of various surface roughnesses and at different deposition incidence angles. |
id | cern-435198 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1999 |
record_format | invenio |
spelling | cern-4351982019-09-30T06:29:59Zdoi:10.1016/S0042-207X(00)00388-2http://cds.cern.ch/record/435198engChiggiato, PAmorosi, SBenvenuti, CristoforoMalabaila, MExperimental evaluation of niobium film pinholes [for LEP cavities]Accelerators and Storage RingsTo assess the quality of vacuum-deposited films, well-defined areas of free-hanging thin film may be obtained by chemically dissolving the substrate on a fraction of its surface. A global evaluation of the thin film pinholes is then possible by measuring the gas conductance across the film. To do so, copper discs clamped between Con-Flat flanges have been used to separate a chamber filled with helium gas from another chamber where the helium throughput was measured. This method has been used to compare films produced under dust-free and dusty conditions, of various surface roughnesses and at different deposition incidence angles.CERN-EST-99-003-SMoai:cds.cern.ch:4351981999-12-15 |
spellingShingle | Accelerators and Storage Rings Chiggiato, P Amorosi, S Benvenuti, Cristoforo Malabaila, M Experimental evaluation of niobium film pinholes [for LEP cavities] |
title | Experimental evaluation of niobium film pinholes [for LEP cavities] |
title_full | Experimental evaluation of niobium film pinholes [for LEP cavities] |
title_fullStr | Experimental evaluation of niobium film pinholes [for LEP cavities] |
title_full_unstemmed | Experimental evaluation of niobium film pinholes [for LEP cavities] |
title_short | Experimental evaluation of niobium film pinholes [for LEP cavities] |
title_sort | experimental evaluation of niobium film pinholes [for lep cavities] |
topic | Accelerators and Storage Rings |
url | https://dx.doi.org/10.1016/S0042-207X(00)00388-2 http://cds.cern.ch/record/435198 |
work_keys_str_mv | AT chiggiatop experimentalevaluationofniobiumfilmpinholesforlepcavities AT amorosis experimentalevaluationofniobiumfilmpinholesforlepcavities AT benvenuticristoforo experimentalevaluationofniobiumfilmpinholesforlepcavities AT malabailam experimentalevaluationofniobiumfilmpinholesforlepcavities |