Cargando…
Lowering the activation temperature of TiZrV non-evaporable getter films
In order to reduce the activation temperature of the TiZrV alloy, thin films of various compositions were produced by three-cathode magnetron sputtering on stainless steel substrates. For the characterisation of the activation behaviour the surface chemical composition has been monitored by Auger El...
| Autores principales: | , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
1999
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/437647 |