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Lowering the activation temperature of TiZrV non-evaporable getter films

In order to reduce the activation temperature of the TiZrV alloy, thin films of various compositions were produced by three-cathode magnetron sputtering on stainless steel substrates. For the characterisation of the activation behaviour the surface chemical composition has been monitored by Auger El...

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Detalles Bibliográficos
Autores principales:	Taborelli, M, Prodromides, A E, Scheuerlein, C
Lenguaje:	eng
Publicado:	1999
Materias:	Engineering
Acceso en línea:	http://cds.cern.ch/record/437647

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