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Annealing of ion-implanted GaN

$^{111m}$Cd and $^{112}$Cd ions have been implanted into GaN. With photoluminescence spectroscopy and perturbed $\gamma-\gamma$-angular correlation spectroscopy (PAC) the reduction of implantation damage and the optical activation of the implants have been observed as a function of annealing tempera...

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Detalles Bibliográficos
Autores principales: Burchard, A, Haller, E E, Stötzler, A, Weissenborn, R, Deicher, M
Lenguaje:eng
Publicado: 1999
Materias:
Acceso en línea:http://cds.cern.ch/record/438243