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Vacuum properties of TiZrV non-evaporable getter films

Sputter-deposited thin films of TiZrV are fully activated after 24 h "in situ" heating at 180 °C. This activation temperature is the lowest of some 18 different getter coatings studied so far, and it allows the use of the getter thin film technology with aluminium alloy vacuum chambers, wh...

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Detalles Bibliográficos
Autores principales: Benvenuti, Cristoforo, Chiggiato, P, Costa-Pinto, P, Escudeiro-Santana, A, Hedley, T, Mongelluzzo, A, Ruzinov, V, Wevers, I
Lenguaje:eng
Publicado: 1999
Materias:
Acceso en línea:http://cds.cern.ch/record/442323
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author Benvenuti, Cristoforo
Chiggiato, P
Costa-Pinto, P
Escudeiro-Santana, A
Hedley, T
Mongelluzzo, A
Ruzinov, V
Wevers, I
author_facet Benvenuti, Cristoforo
Chiggiato, P
Costa-Pinto, P
Escudeiro-Santana, A
Hedley, T
Mongelluzzo, A
Ruzinov, V
Wevers, I
author_sort Benvenuti, Cristoforo
collection CERN
description Sputter-deposited thin films of TiZrV are fully activated after 24 h "in situ" heating at 180 °C. This activation temperature is the lowest of some 18 different getter coatings studied so far, and it allows the use of the getter thin film technology with aluminium alloy vacuum chambers, which cannot be baked at temperatures higher than 200 °C.An updated review is given of the most recent results obtained on TiZrV coatings, covering the following topics: influence of the elemental composition and crystal structure on activation temperature, discharge gas trapping and degassing, dependence of pumping speed and surface saturation capacity on film morphology, ageing consequent to activation-air venting cycles and ultimate pressures. Furthermore, the results obtained when exposing a coated particle beam chamber to synchrotron radiation in a real accelerator environment (ESRF Grenoble) are presented and discussed.
id cern-442323
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1999
record_format invenio
spelling cern-4423232019-09-30T06:29:59Zhttp://cds.cern.ch/record/442323engBenvenuti, CristoforoChiggiato, PCosta-Pinto, PEscudeiro-Santana, AHedley, TMongelluzzo, ARuzinov, VWevers, IVacuum properties of TiZrV non-evaporable getter filmsAccelerators and Storage RingsSputter-deposited thin films of TiZrV are fully activated after 24 h "in situ" heating at 180 °C. This activation temperature is the lowest of some 18 different getter coatings studied so far, and it allows the use of the getter thin film technology with aluminium alloy vacuum chambers, which cannot be baked at temperatures higher than 200 °C.An updated review is given of the most recent results obtained on TiZrV coatings, covering the following topics: influence of the elemental composition and crystal structure on activation temperature, discharge gas trapping and degassing, dependence of pumping speed and surface saturation capacity on film morphology, ageing consequent to activation-air venting cycles and ultimate pressures. Furthermore, the results obtained when exposing a coated particle beam chamber to synchrotron radiation in a real accelerator environment (ESRF Grenoble) are presented and discussed.CERN-EST-99-007-SMoai:cds.cern.ch:4423231999-12-15
spellingShingle Accelerators and Storage Rings
Benvenuti, Cristoforo
Chiggiato, P
Costa-Pinto, P
Escudeiro-Santana, A
Hedley, T
Mongelluzzo, A
Ruzinov, V
Wevers, I
Vacuum properties of TiZrV non-evaporable getter films
title Vacuum properties of TiZrV non-evaporable getter films
title_full Vacuum properties of TiZrV non-evaporable getter films
title_fullStr Vacuum properties of TiZrV non-evaporable getter films
title_full_unstemmed Vacuum properties of TiZrV non-evaporable getter films
title_short Vacuum properties of TiZrV non-evaporable getter films
title_sort vacuum properties of tizrv non-evaporable getter films
topic Accelerators and Storage Rings
url http://cds.cern.ch/record/442323
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AT escudeirosantanaa vacuumpropertiesoftizrvnonevaporablegetterfilms
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